Title:
WAFER BOAT TRANSPORTING JIG
Document Type and Number:
Japanese Patent JPS624336
Kind Code:
A
Abstract:
PURPOSE: To replace the supporting part of a wafer boat transporting jig which tends to get thermal damages periodically by making the supporting part and an arm mated and unmated freely.
CONSTITUTION: A wafer boat transporting jig has a forked arm 1 and a supporting part 3 for a wafer boat 2. One end 5 of the arm 1 is incorporated into one end 4 of the supporting part 3 so as to be mated and unmated with each other freely. The boat installing part 6 of the supporting part 3 is so constructed as to be able to support the wafer boat 2. A heater is attached to the outside of a processing tube 8 and the inside of the tube 8 is heated by the heater.
Inventors:
TANAKA TAKASHI
SATO SHUNKICHI
SATO SHUNKICHI
Application Number:
JP14249585A
Publication Date:
January 10, 1987
Filing Date:
July 01, 1985
Export Citation:
Assignee:
TOSHIBA CERAMICS CO
International Classes:
H01L21/677; F27D3/12; F27D11/02; H01L21/22; H01L21/67; H01L21/673; H01L21/68; (IPC1-7): F27D3/12; F27D11/02; H01L21/68
Attorney, Agent or Firm:
Toru Tanabe
Next Patent: SEMICONDUCTOR WAFER SUPPORTING BOAT