Title:
WAFER CARRIER
Document Type and Number:
Japanese Patent JPH06216229
Kind Code:
A
Abstract:
PURPOSE: To provide a wafer carrier in which semiconductor wafers are set without inclination.
CONSTITUTION: In a wafer carrier containing a plurality of semiconductor wafers 3A, 3E and 3F vertically stacked at regular intervals, the sectional shape of grooves 4 of sidewalls 1 for holding the semiconductor wafers 3A, 3E and 3F is a symmetrical with respect to the center line C of the horizontal direction, and inclination does not occur in the semiconductor wafers 3A, 3E and 3F even if the semiconductor wafers 3A, 3E and 3F are moved from the optimum position in all directions.
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Inventors:
SUZUKI TAKASHI
Application Number:
JP570193A
Publication Date:
August 05, 1994
Filing Date:
January 18, 1993
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B65D85/00; B65D85/38; B65D85/86; H01L21/673; H01L21/68; (IPC1-7): H01L21/68; B65D85/00; B65D85/38
Attorney, Agent or Firm:
Yamato Tsutsui
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