PURPOSE: To improve carrying working property by supporting at least one row of a stocker row ratably when a wafer in a cassette stored in a cassette stocker is taken out by a wafer transferring machine provided with a chucking head.
CONSTITUTION: A wafer transferring machine 3 and a cassette stocker 16 are positioned between a wafer casseffe accepting device 1 provided with an elevatable cassette accepting base 5 capable of loading two wafer cassettes 6 and a port elevator 4 provided with a lifting arm 12 on whose tip a port 14 on which wafers 15 are held on multiple steps is placed in horizontal position. The wafer transferring machine 3 takes out each wafer 15 in the cassettes 6 stored on shelves 16 (a) and 16 (b) of the stocker 16 and transferred to the port 14. At this time, the shelf 16 (b) of the stocker 16 is supported rotatably around the vertical axis in relation to the shelf 16 (a) so as to be exactly opposite to a chucking head 11 to carry out taking out of the wafer 15 immediately.
IKEDA KAZUTO
YOSHIDA HISASHI
KAIHATSU HIDEKI
KANO RIICHI
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