To provide a wafer carrying hand for preventing production of hurts and dust due to rubbing of a wafer and a hand and accurately and surely grasping the wafer.

The wafer carrying hand provided with a hand body 1 connected to a robot arm, at least two fixed pawls 3 and a mobile pawl 4 attached to the hand body 1 and a grasping means engaging these fixed pawls 3 and mobile pawl 4 at a position separating an interval of an outer peripheral edge part of the wafer 9 and grasping the wafer 9 is provided with a mobile body 6 attached through an elastic body 7 on the hand body 1 and displaced in the operation direction of the mobile pawl 4, and at least three holding parts 8 attached to the upper part of the mobile body 6, and the wafer 9 is mounted on the holding parts 8.