PURPOSE: To improve a throughput in a semiconductor manufacturing device by dissolving latency time at the time of carrying a wafer, and reducing dead time during a carrying action to shorten a wafer carrying time.
CONSTITUTION: In a cassette delivering/receiving device 20 to deliver/receive a wafer cassette 6 to/from a cassette stocker 2, the device has an ascendable traversing beam 22, which is provided with at least one set of cassette pedestals 5 which can receive and move the wafer cassette, and at least one set of cassette pedestals is made traversable. The wafer cassette can be freely delivered and received to/from all the shelves of a cassete stocker and changed, and n addition, the wafer cassette can be delivered and received in parallel with another equipment as interference is avoided even in the course of the action of the another equipment to/from the cassette stocker.
YOSHIDA HISASHI
IKEDA KAZUTO
KANO RIICHI
