Title:
WAFER CASSETTE JIG
Document Type and Number:
Japanese Patent JPS61236136
Kind Code:
A
Abstract:
PURPOSE:To facilitate the automatic control of the processing work for an object and to enable the object to coincide with the information of the object in the shift between each process by a method wherein the memory device is housed in the wafer cassette and the information on the wafers in the cassette are read-written by the memory device. CONSTITUTION:A memory device 6 having a read-write function and an erasable function like a magnetic bubble memory and an EEPROM is embedded in a cassette main body 4 and the memory device 6 read-writes the name of each type, each lot No., the date of work in every process, the name of each operator, the work conditions in each wafer and the actual results and the information on the wafers in the cassette are stored. The operator connects the information input/output terminals 7 of the cassette to the microcomputer with CRT through the medium utilizing an optical communication, the work conditions needed for processing are read out by the memory device 6, a wafer is taken out from the cassette main body 4 and a processing work is performed on the wafer.
Inventors:
NAKAZATO JUN
IWASAKI TAKEMASA
MORIKAWA KANJI
TAKEUCHI MASARU
IWASAKI TAKEMASA
MORIKAWA KANJI
TAKEUCHI MASARU
Application Number:
JP7643485A
Publication Date:
October 21, 1986
Filing Date:
April 12, 1985
Export Citation:
Assignee:
HITACHI LTD
International Classes:
H01L21/02; B65G1/02; B65G1/137; H01L21/00; H01L21/67; H01L21/68; (IPC1-7): H01L21/68
Domestic Patent References:
| JP58177938B |
Attorney, Agent or Firm:
Katsuo Ogawa