To suppress the deformation of the peripheral edge of a wafer and to prevent a failure such as the over polishing of the wafer caused by the deformation.
In a polishing head 13 polishing the wafer W pressed against a polishing pad 16 thereof, the reinforcement member 22A of circular shape in a plan view whose inner diameter is substantially equal to the diameter of the wafer W is applied to the top surface of the wafer W with the adhesive 21. The reinforcement member 22A is formed in a substantially inverted dish shape (or in a flat plate shape), and the wafer W is engaged to the inside of the reinforcement member 22A. Polishing the wafer W attached to the reinforcement member 22A helps suppress the buckling distortion and the like of the peripheral edge of the wafer W caused when the wafer W comes into contact or collision with the retainer ring 19 while it is being polished.
JPH09272054A | 1997-10-21 | |||
JP2001102336A | 2001-04-13 | |||
JP2008100295A | 2008-05-01 |
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