Title:
WAFER FIXING PLATE
Document Type and Number:
Japanese Patent JP2008062374
Kind Code:
A
Abstract:
To easily mount and dismount a workpiece and a fixing member having a dressing function when cutting the workpiece by using a cutting blade and cutting the fixing member for fixing a wafer simultaneously for dressing.
In a cutting device for cutting the wafer held on a chuck table by the cutting blade, a wafer fixing plate 8 held on the chuck table to fix the wafer is composed of: a plate main body 80 for dressing the cutting blade; and an adhesive layer 81 applied on a surface of the plate main body 80. By providing the adhesive layer 81 on a surface of the wafer fixing plate, the wafer is easily fixed or peeled off.
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Inventors:
SEKIYA KAZUMA
Application Number:
JP2007170382A
Publication Date:
March 21, 2008
Filing Date:
June 28, 2007
Export Citation:
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B53/00; B24B27/06; B24B53/12; H01L21/301; H01L21/683
Domestic Patent References:
JP2004207591A | 2004-07-22 | |||
JPH11188626A | 1999-07-13 | |||
JP2007152440A | 2007-06-21 | |||
JPH0888202A | 1996-04-02 | |||
JPH01269506A | 1989-10-27 |
Foreign References:
WO2003085714A1 | 2003-10-16 |
Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Kyoko Kawamura