Title:
ウェハ研削装置及びウェハ研削方法
Document Type and Number:
Japanese Patent JP6518449
Kind Code:
B2
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Inventors:
Maeda Yuki
Application Number:
JP2015016601A
Publication Date:
May 22, 2019
Filing Date:
January 30, 2015
Export Citation:
Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
B24B47/22; B24B7/04; B24B51/00; H01L21/304
Domestic Patent References:
| JP63038967U | ||||
| JP2013144327A | ||||
| JP62107935A | ||||
| JP2012135853A | ||||
| JP59192457A | ||||
| JP11123655A | ||||
| JP11198008A |
Attorney, Agent or Firm:
Takamitsu Shimizu