Title:
WAFER HOLDER TO BE USED FOR MANUFACTURE OF SEMICONDUCTOR
Document Type and Number:
Japanese Patent JPS6025245
Kind Code:
A
Abstract:
PURPOSE:To enable a wafer holder to be used effectively for conveyance of a wafer by a method wherein a leaf spring enabled to make one edge to be displaced in the perpendicular direction, and transferably semifixed guides are provided to the plane of a base plate. CONSTITUTION:A leaf spring 8 and semifixed guides 11 are fixed on the top surface of a base plate 1 by screws 12 from the back, and a wafer 2 is pressed to be fixed on the base plate 1 according to downward forces of the semifixed guides 11 and the leaf spring 8. Threaded holes 13 of a large number are provided on the base plate, and the semifixed guides 11 are transferred fitting to the shape of the wafer. Elongation of the tip of the leaf spring 8, and to make it correspond to the shape of the wafer is also possible as occasion demands.
Inventors:
KIRIYAMA KENJI
Application Number:
JP13325983A
Publication Date:
February 08, 1985
Filing Date:
July 21, 1983
Export Citation:
Assignee:
TEL VARIAN KK
International Classes:
H01L21/683; H01L21/67; H01L21/68; H01L21/687; (IPC1-7): H01L21/68