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Title:
WAFER HOLDER AND WAFER TRANSPORTATION DEVICE EQUIPPED WITH WAFER HOLDER
Document Type and Number:
Japanese Patent JP2005184010
Kind Code:
A
Abstract:

To provide a wafer holder and a wafer transportation device equipped with the wafer holder.

A wafer holder supports a wafer and rotatably and horizontally moved in a chamber. A contact area with the wafer is reduced, and a part where a contaminant is caused due to abrasion is sealed from outside by a cover 114. The wafer holder is fixed to a guide rail 152 and horizontally moved. Therefore, the wafer transportation device does not allow the abrasion to be caused due to a friction between the guide rail 152 and the wafer holder.


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Inventors:
KIM TAE KYUNG
CHI RINTEI
SHIN KYOUNG-SU
JUN CHUNGSAM
Application Number:
JP2004372249A
Publication Date:
July 07, 2005
Filing Date:
December 22, 2004
Export Citation:
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Assignee:
SAMSUNG ELECTRONICS CO LTD
International Classes:
H01L21/68; B24B5/00; H01L21/677; H01L21/683; H01L21/687; (IPC1-7): H01L21/68
Attorney, Agent or Firm:
Mikio Hatta
Yasuo Nara
Etsuko Saito
Katsuyuki Utani
Toshifumi Fujii



 
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