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Document Type and Number:
Japanese Patent JPS6446948
Kind Code:

PURPOSE: To reduce the number of handlings of wafer, by providing the bottom surface and the sidewall of a holder main body, and the sidewall of a lid, with a plurality of comparatively small through holes.

CONSTITUTION: A plurality of through holes 4a, 4b are arranged on the sidewall and the bottom surface of a holder main body 1. A plurality of through holes 4c are arranged on the sidewall of a lid 2, and one through hole 4d is arranged on the upper surface of the lid 2. Since the water holder main body and the lid are provided with a plurality of through holes in this manner, at the time of wafer washing and wafer measuring, the wafer can be subjected to washing and measuring while it is accommodated in the holder without being taken out therefrom. Thereby, the chance of direct handling of wafer by forceps and the like is reduced, and the damage of wafer can be remarkably decreased.

Segawa, Kazuaki
Hayase, Iwao
Application Number:
Publication Date:
February 21, 1989
Filing Date:
July 28, 1987
Export Citation:
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International Classes:
H01L21/673; H01L21/68; (IPC1-7): H01L21/68

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