Title:
ウエハ研磨装置
Document Type and Number:
Japanese Patent JP3552108
Kind Code:
B2
Inventors:
Yukinori Kida
Application Number:
JP2001302161A
Publication Date:
August 11, 2004
Filing Date:
September 28, 2001
Export Citation:
Assignee:
Kida Industry Co., Ltd.
Masaki Takahashi
Masaki Takahashi
International Classes:
B24B37/27; B24B37/28; H01L21/304; (IPC1-7): H01L21/304; B24B37/04
Domestic Patent References:
| JP2002018708A |