Title:
ウェーハの研磨方法
Document Type and Number:
Japanese Patent JP4354769
Kind Code:
B2
More Like This:
Inventors:
Kazuhisa Arai
Hiroaki Hiraide
Hiroaki Hiraide
Application Number:
JP2003327861A
Publication Date:
October 28, 2009
Filing Date:
September 19, 2003
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B7/22; H01L21/304; B24B9/00; B24B29/00
Domestic Patent References:
| JP2000173961A | ||||
| JP2003181767A | ||||
| JP2002283212A | ||||
| JP8037169A | ||||
| JP2005026413A | ||||
| JP2005019435A | ||||
| JP7045568A | ||||
| JP11207583A |
Attorney, Agent or Firm:
Isao Sasaki
Kyoko Kawamura
Kyoko Kawamura