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Title:
WAFER PROTECTING MEMBER AND PROTECTING METHOD
Document Type and Number:
Japanese Patent JP2010171297
Kind Code:
A
Abstract:

To provide a wafer protecting member which can be manufactured inexpensively to be disposable for every wafer, and to provide a protecting method of protecting a semiconductor wafer using the wafer protecting member.

The wafer protecting member 2 is formed of a thermally curable resin to be thermally cured, and has flexibility. The wafer protecting member 2 has a long-sized groove 4 formed along the length such that a peripheral edge of the semiconductor wafer is fitted therein. The wafer protecting member 2 is fitted while the peripheral edge of the semiconductor wafer is fitted in the groove 4, and then the wafer protecting member 2 is thermally cured thereafter. Consequently, the semiconductor wafer can be protected. The wafer protecting member 2 is formed of a resin material, so it can be manufactured inexpensively and is disposable for each semiconductor wafer.


Inventors:
IMAI ATSUSHI
Application Number:
JP2009013896A
Publication Date:
August 05, 2010
Filing Date:
January 26, 2009
Export Citation:
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Assignee:
TOYOTA MOTOR CORP
International Classes:
H01L21/683; B65D59/00; B65D81/02; B65D85/86
Attorney, Agent or Firm:
Kaiyu International Patent Office



 
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