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Title:
WAFER SCRUBBING BRUSH CORE
Document Type and Number:
Japanese Patent JP3628959
Kind Code:
B2
Abstract:

PROBLEM TO BE SOLVED: To provide a brush core for scrubbing a substrate and a method of manufacturing the same.
SOLUTION: A brush core 250 is formed of a tubular core extending between a first end 253 and a second end 251. The first end has an opening into a bore that is defined through a middle of the tubular core and extends along an inner length of the tubular core. A first plurality of holes 260 are oriented along a plurality of first lines 252 that extend in the lengthwise direction of the tubular core, and each of the first plurality of holes 260 defines a path to the bore of the tubular core. A second plurality of holes 260 are oriented along a plurality of second lines 253 that extend in the lengthwise direction of the tubular core. The first plurality of lines and the second plurality of lines and the holes of the first and second plurality of holes are equally spaced apart. The holes of the second plurality of holes are offset relative to the holes of the first plurality of holes.


Inventors:
Dickey, Tanlin
Svirchevski, Julia S.
Anderson, Donald E.
Ravkin, Mike
Treichel, Helmuth W.
Pascal, Roy Winston
Gardner, Douglas G.
Application Number:
JP2000000366826
Publication Date:
March 16, 2005
Filing Date:
December 01, 2000
Export Citation:
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Assignee:
LAM RES CORP
International Classes:
A46B7/10; A46B11/02; A46B13/02; H01L21/00; H01L21/304; (IPC1-7): H01L21/304; A46B7/10; A46B11/02; A46B13/02
Domestic Patent References:
JP7074132A
JP49023635Y1
Attorney, Agent or Firm:
五十嵐 孝雄
下出 隆史
市川 浩
加藤 光宏



 
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