Title:
WAFER STORAGE SHELF
Document Type and Number:
Japanese Patent JP2969976
Kind Code:
B2
Abstract:
PURPOSE: To offer a wafer storage box which is able to restrict the growth of natural oxide film during the storage.
CONSTITUTION: In a wafer storage shelf having a plurality Of partitioned shelves 11, which a wafer for a semi-conductor is taken into or out, each partitioned shelf 11 is provided with a wafer storage room 14, which is of a boxy body having a front opening and which is partitioned by filters 12A, 12B, and fluid supply/discharge passages 13A, 13B, which are connected to the wafer storage room via the filters 12A, 12B in addition to a door 20, which is able to close the front opening tightly and which is opened or closed by means of an opening or closing mechanism. One end of a gas supplying pipe 31A is connected to the fluid supply passage, while a gas discharging pipe 31B is connected to the fluid discharge passage. In addition, inactive fluid is supplied to the gas supplying pipe from an inactive fluid storage tank situated outside.
Inventors:
MORITA HIROMI
KONO HITOSHI
YAMASHITA TETSUPEI
MURATA MASANAO
KONO HITOSHI
YAMASHITA TETSUPEI
MURATA MASANAO
Application Number:
JP940491A
Publication Date:
November 02, 1999
Filing Date:
January 29, 1991
Export Citation:
Assignee:
SHINKO DENKI KK
International Classes:
B65G1/02; B65G1/00; F24F7/06; (IPC1-7): B65G1/00; F24F7/06
Domestic Patent References:
| JP5567720A | ||||
| JP2120640U | ||||
| JP6186630U |
Attorney, Agent or Firm:
Kaji Yoshiyuki