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Title:
WAFER TAKE OUT METHOD OF WIRE SAW
Document Type and Number:
Japanese Patent JPS61182761
Kind Code:
A
Abstract:

PURPOSE: To prevent a cut surface from generating a flaw and/or a saw mark, by clamping a wafer train, after a workpiece to be cut finishes cutting, with separately provided take out arms further cutting a workpiece fixing bed again by a wire and taking out said wafer train.

CONSTITUTION: A wire 2, cutting a work to be cut 4, bites at a work fixing bed 1. Next, a wafer train 4i is clamped in a manner being slightly lifted by separately provided, for instance, three wafer take out arms (3-1) (3-2). Next the wire 2 further cuts said fixing bed 1. In this way, if cutting of said fixing bed 1 is finished, the wafer train 4i, being lifted by once moving upward the take out arms (3-1) (3-2), is separated from said fixing bed 1. Subsequently, the wafer train 4i is drawn out to the outside of a wire saw by retracting said take out arms (3-1) (3-2). In this way, a wafer, being taken out without cleaning an abrasive grain or the like accumulated between the wafers after the work finishes cutting, is efficiently taken out with no generation of a saw mark and/or a flaw on the wafer.


Inventors:
TAKASE JUNICHI
MITANI MITSUO
Application Number:
JP2315985A
Publication Date:
August 15, 1986
Filing Date:
February 07, 1985
Export Citation:
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Assignee:
SUMITOMO METAL IND
NIPPON SPINDLE MFG CO LTD
International Classes:
B24B27/06; B28D5/00; B28D5/04; (IPC1-7): B24B27/06; B28D1/22
Domestic Patent References:
JPS61125767A1986-06-13
JPS60172460A1985-09-05
Foreign References:
US4160439A1979-07-10
Attorney, Agent or Firm:
Yoshihisa Oshida



 
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