PURPOSE: To provide a wafer transfer device capable of arrangement at a production line easily by providing connecting members comprising platy elastic members of which one end is connected to an operation member and makes U-turn at the one end of a transfer table and the other end of which is connected to an extruding member to reduce a set area and occupation area in vertical direction.

CONSTITUTION: A 2nd wafer cassette 16 to transfer a wafer 14 is located so that an inserting hole 16a of it is opposed to an inserting hole 15a of a first wafer cassette 15. When an operation member 28 is operated toward the one end of a transfer table 23, the operation member 28 moves while rotating a roller 27. By this movement, connecting members 34 and 35 make U-turn while varying their cross-sections in flat when they pass a roller device 32 and, after passing, they recover the shape of arc and rigidity and fed in the direction reverse to the operating direction of the operation member 28. Then an extruding member 37 pushes the wafer 14 from the first wafer cassette 15 into the second wafer cassette 16 to complete the transfer of the wafer 14.