PURPOSE: To provide a wafer transfer equipment having a transfer robot whose pencil can be adjusted to any intermediate position between racks of a boat or wafer cassette.

CONSTITUTION: A wafer transfer equipment consists of a wafer cassette 23 for holding wafers on its racks; a boat 17 for holding wafers on its racks; and a transfer robot 19 supporting one end of a wafer suction pencil 20 by an arm 19A. The transfer robot 19 transfers a wafer from a rack of the wafer cassette 23 to that of the boat 17, and vice versa. A dummy 30 and 31 having grooves in the direction of the row of the racks is installed on the boat 17 side and on the wafer cassette 23 side. The arm 19A houses a drive mechanism 41 driving a sensor 44 for detecting the position of the grooves in the dummies 30 and 31 and a controller 46 controlling the movement of the drive mechanism 41. The arm 19A also has a frame body 40 supporting one end of the pencil 20.