Title:
Wafer transfer robot
Document Type and Number:
Japanese Patent JP5993873
Kind Code:
B2
Inventors:
Katsuhiro Yamazoe
Shinichi Imai
Kosuke Sakata
Yoshiki Nishijima
Hiroaki Tsukimoto
Saino cultivation
Shinichi Imai
Kosuke Sakata
Yoshiki Nishijima
Hiroaki Tsukimoto
Saino cultivation
Application Number:
JP2013549020A
Publication Date:
September 14, 2016
Filing Date:
December 15, 2011
Export Citation:
Assignee:
Tatsumo Co., Ltd.
International Classes:
H01L21/677; B25J9/06
Domestic Patent References:
| JP2000150617A |
Foreign References:
| WO2008059815A1 |
Attorney, Agent or Firm:
Kaede International Patent Office
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