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Patent Searching and Data


Title:
WAFER TRANSPORTING FORK
Document Type and Number:
Japanese Patent JP2001203251
Kind Code:
A
Abstract:

To provide a wafer transporting fork which is structured so that the wafer mounted on the wafer transporting fork hardly drops, if the wafer transporting fork moves at a high speed.

The wafer transporting fork 1 for mounting and transporting a wafer W is mounted on the arm top end of a transporting apparatus. The fork body 2 has a recess 3 forming a wafer mounting surface 4, and a slope 5a rising from a lower part to an upper part towards the radial center of the recess 3 is formed on the wall 5 of the recess 3 at the wafer mounting surface so that the diameter at the slope top end is larger than the outer diameter of the wafer W.


Inventors:
KAMATA HIROYUKI
Application Number:
JP2000011805A
Publication Date:
July 27, 2001
Filing Date:
January 20, 2000
Export Citation:
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Assignee:
YASKAWA ELECTRIC CORP
International Classes:
H01L21/677; B25J15/08; B65G49/07; H01L21/68; (IPC1-7): H01L21/68; B25J15/08; B65G49/07