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Title:
WAFER TYPE TEMPERATURE SENSOR, METHOD OF MANUFACTURING WAFER TYPE TEMPERATURE SENSOR, AND TEMPERATURE MEASURING METHOD
Document Type and Number:
Japanese Patent JP2007187567
Kind Code:
A
Abstract:

To provide a wafer type temperature sensor capable of automating a temperature measuring process, and preventing deterioration of measurement accuracy even at high temperatures.

The temperature sensor 11 includes a wafer 12; and a plurality of temperature sensors 13 arranged on each partitioned domain by partitioning the upside of the wafer 12 into a plurality of domains, for detecting the temperature of the upside of the wafer 12. Each temperature sensor 13 includes, as components, a linear expansion body 14, a latch mechanism 15 as a displacement regulation means, a reset circuit 16 as a deregulation means, and a scale 17 as a temperature display means. The linear expansion body 14 has a cantilever shape having a fixed end 14a fixed to the wafer 12 and a free end 14b whose position on the wafer 12 is displaced by a temperature change.


Inventors:
Harada, Muneo
Minami, Tomohide
Application Number:
JP2006000006244
Publication Date:
July 26, 2007
Filing Date:
January 13, 2006
Export Citation:
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Assignee:
TOKYO ELECTRON LTD
International Classes:
G01K1/14; G01K1/02; G01K5/60; H01L21/027; G01K1/14; G01K1/00; G01K5/00; H01L21/02