To provide a walking action drive unit which is rigid and capable of high speed and high precision alignment, and to provide an alignment device which uses the same for positioning an object at a target position at once, being compact as a whole device.
Three piezoelectric elements 33 added around a center shaft are arranged between a base stage 34 and a movable block 35. A plurality of piezoelectric drive bodies 31 provided with a movable post for intensified displacement action are provided on the movable block 35. A plurality of piezoelectric drive bodies 31 are configured for walking action relative to other member by sequentially swinging the movable block 35 of each piezoelectric drive body 31 while contacting/departing from other member in sequence.
COPYRIGHT: (C)2005,JPO&NCIPI
Akira Yamauchi
Satoshi Nara
Eiji company book
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