Title:
WASHER AND METHOD THEREOF
Document Type and Number:
Japanese Patent JP3236742
Kind Code:
B2
Abstract:
PURPOSE: To unnecessitate a transfer region of a substrate to be treated to reduce the occupying area of a washer by fixing the substrate to be treated to transfer a washing part, and also to simplify the constitution of the washer by relatively rotating a holding part of the substrate to be treated and the washing part.
CONSTITUTION: With a pair of holding arms 21, 22 being in an open state. a glass substrate G is delivered from a main arm to an elevating/lowering stage 42 in an elevated state. And both holding arms 21, 22 are closed to hold the glass substrate G at both side edges, and the elevating/lowering stage 42 is lowered. Further, washing brushes 30 in a pair of washing parts 3a, 3b are made close to each other to bring them into contact with the both surfaces of the glass substrate G, and are moved while rotated. At this time, washing liquid such as water is blown out to the forward side in the moving direction of the washing brushes 31 to wash both surfaces of the glass substrate G. And after the glass substrate G is delivered to the elevating/lowering stage 42 which has been elevated, it is taken out from the washer from the main arm to transfer it to the next process.
Inventors:
Dr. Hashimoto
Application Number:
JP25910794A
Publication Date:
December 10, 2001
Filing Date:
September 28, 1994
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
B08B11/04; B08B3/02; H01L21/304; (IPC1-7): B08B3/02; B08B11/04; H01L21/304
Domestic Patent References:
| JP645303A | ||||
| JP4213826A | ||||
| JP5218625A | ||||
| JP6267918A | ||||
| JP385791A | ||||
| JP538602A | ||||
| JP4123532U | ||||
| JP62164347U | ||||
| JP585070U | ||||
| JP5735785U |
Attorney, Agent or Firm:
Toshio Inoue
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