To provide a washing apparatus, a washing method and a production method of a product, which realize effective removal of a contaminant adhering to a work, and also enable a work cleaning in which a damage of ESD destruction to the work, etc. is decreased.

A cleaning apparatus 1 has a plurality of cleaning mechanisms of a blast part 7, a vibration brush part 8, a pulse spray part 9, and the like. The cleaning of the work 6 by the blast part 7 and the vibration brush part 8 is carried out in a cleaning liquid stored in a cleaning tank 3 and prevents ESD destruction, etc. In the cleaning of the work 6 by the pulse spray part 9, the work 6 is taken out from the cleaning liquid to be cleaned so that re-adhesion of the contaminant remaining in the cleaning liquid to the work 6 is prevented.

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