Title:
WASHING APPARATUS USING WASHING SOLUTION
Document Type and Number:
Japanese Patent JPH07108233
Kind Code:
A
Abstract:
PURPOSE: To perform washing using a washing soln. such as an org. solvent or pure water by a simple apparatus.
CONSTITUTION: In a washing apparatus wherein a member to be treated is treated with a washing soln. and subjected to drainage treatment to be dried, a nitrogen gas separator 7 having a separator main body 9 wherein a large number of hollow yarns formed from an oxygen-nitrogen separation membrane are arranged side by side is arranged to the washing apparatus 1 and the nitrogen gas separated and purified from the compressed air supplied to the nitrogen gas separator 7 is supplied to the treatment chamber 2 of the washing apparatus 1.
Inventors:
IRIE MITSUNORI
SAWA HIROYUKI
SAWA HIROYUKI
Application Number:
JP25539993A
Publication Date:
April 25, 1995
Filing Date:
October 13, 1993
Export Citation:
Assignee:
IWATANI INT CORP
NIPPON STEEL CORP
KURARAY CO
KURARAY CHEMICAL KK
NIPPON STEEL CORP
KURARAY CO
KURARAY CHEMICAL KK
International Classes:
B08B3/10; B01D53/22; H01L21/304; (IPC1-7): B08B3/10; B01D53/22; H01L21/304
Domestic Patent References:
| JPH01199431A | 1989-08-10 | |||
| JPH01281124A | 1989-11-13 | |||
| JPH06173047A | 1994-06-21 |
Attorney, Agent or Firm:
Juichi Chatan
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