To wash a substrate for a short time by reducing the possiblity that the substrate is recontaminated by a washing liquid.
A washing apparatus for immersing the article to be washed held by a holding means in the washing liquid to wash the same has an outer tank having an opening part at its upper part and closed at its bottom part, the inner tank arranged in the outer tank so as to provide a predetermined gap with respect to the outer tank and having an opening part at its upper part and having a lower opening part communicating with the interior of the outer tank on the side of the bottom part of the outer tank and a washing liquid supply means arranged in the vicinity of the lower opening part of the inner tank and supplying the washing liquid along the inner surface of the inner tank from below to above.
TSUJI HIROKI
KITAGAWA KENICHI
MORITO TAISHIN
