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Title:
WASHING DRYER
Document Type and Number:
Japanese Patent JPH11290791
Kind Code:
A
Abstract:

To provide a washing dryer in which drops stuck on an inner cover on washing are forcibly removed on drying to prevent the drops stuck on the inner cover from falling onto a washed substrate.

This washing dryer consists of a washing tank 1 incorporating a cassette holding base 3 for rotatably holding a substrate housing cassette 2 and a spray nozzle 4 for spraying washing liquid to the substrate housing cassette 2 held on the cassette holding base 3, a cover body 6 for closing an opening of the washing tank 1 which cover body can be opened and closed, and an evacuating apparatus 15 and a discharge device 16 each connected to the washing tank 1. The cover body 6 is provided with a drying air intake 7 and an inner cover 8 covering the drying air intake 7 and for preventing the washing liquid from splashing to outside the washing tank 1 through the drying air intake 7. A high pressure air blow-off port 9 for feeding high pressure air into the washing tank 1 is installed in the center of the inner cover 8, and a patch 10 for transmitting high pressure air to an outlet part of the high pressure air blow-off port 9 along the inner surface on the washing tank 1 side of the inner cover 8 is arranged.


Inventors:
IMAZEKI KAZU
Application Number:
JP1998000094821
Publication Date:
October 26, 1999
Filing Date:
April 07, 1998
Export Citation:
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Assignee:
HITACHI LTD
HITACHI DEVICE ENG
International Classes:
G02F1/13; B08B3/02; G02F1/1333; H01L21/304; (IPC1-7): B08B3/02; G02F1/13; G02F1/1333; H01L21/304
Attorney, Agent or Firm:
武 顕次郎



 
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