Title:
WASHING METHOD AND WASHING DEVICE OF METAL MASK
Document Type and Number:
Japanese Patent JP2004234873
Kind Code:
A
Abstract:
To efficiently wash out an organic EL material stuck to a metal mask to be processed in a short time, in a method for disposing the metal mask with the organic EL material deposited in a high-pressure cell as a metal mask to be processed to wash it by using a supercritical fluid or a subcritical fluid.
The metal mask to be processed is so disposed that a corner part thereof is positioned closest to the entrance part of the supercritical fluid or the subcritical fluid.
Inventors:
YAMASHITA MASAMITSU
IWADE TAKU
IWADE TAKU
Application Number:
JP2003018557A
Publication Date:
August 19, 2004
Filing Date:
January 28, 2003
Export Citation:
Assignee:
TORAY ENG CO LTD
International Classes:
C23C14/00; C23C14/04; H01L51/50; H05B33/10; H05B33/14; B08B7/00; (IPC1-7): H05B33/10; B08B7/00; C23C14/00; C23C14/04; H05B33/14
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