Title:
WASHING METHOD AND WASHING DEVICE
Document Type and Number:
Japanese Patent JP2007152308
Kind Code:
A
Abstract:
To provide a washing method which enables the washing of a material to be washed so as to remove only an adherend on the material to be washed without applying a damage such as etching or the like to the material to be washed.
The washing method includes a laser irradiation process for irradiating the material to be washed with a laser with the output and moving speed of a range which does not exert effect on the material to be washed itself but can evaporate the adherend on the material to be washed to evaporate the adherend on the material to be washed.
Inventors:
SUZUKI TETSUO
Application Number:
JP2005354349A
Publication Date:
June 21, 2007
Filing Date:
December 08, 2005
Export Citation:
Assignee:
DIGITAL NETWORK KK
International Classes:
B08B7/00
Domestic Patent References:
| JP2001149877A | 2001-06-05 | |||
| JP2006520534A | 2006-09-07 | |||
| JPH09260303A | 1997-10-03 |
Foreign References:
| WO2004079810A1 | 2004-09-16 |
Attorney, Agent or Firm:
Hiroshi Kobayashi
Eiji Katayama
Nobushi Furuhashi
Yasuhito Suzuki
Eiji Katayama
Nobushi Furuhashi
Yasuhito Suzuki