Title:
洗浄ローラ
Document Type and Number:
Japanese Patent JP4805033
Kind Code:
B2
Abstract:
To provide a washing roller which performs washing effectively by preventing a contaminated washing liquid from staying on a substrate. The washing roller has a roller main body 10, and brush bristles 15 are implanted on the outer peripheral surface to the roller main body. The roller main body has an internal space constituting a channel of the washing liquid, and the internal space is connected with a washing liquid supply pipe 14 through a coupling 12b. At the roller main body 10, two or more nozzles 16 communicated with the internal space and jetting the washing liquid are formed spirally along the axis of the roller main body.
Inventors:
Tadashi Shimai
Shigeru Kawada
Shigeru Kawada
Application Number:
JP2006168613A
Publication Date:
November 02, 2011
Filing Date:
June 19, 2006
Export Citation:
Assignee:
Tokyo Ohka Kogyo Co., Ltd.
International Classes:
H01L21/304; A46B7/10; B08B1/00; G02F1/13
Domestic Patent References:
| JP2005138053A | ||||
| JP7074132A | ||||
| JP2000202379A | ||||
| JP2000015190A |
Attorney, Agent or Firm:
Yu Koyama