PURPOSE: To obtain the subject device excellent in collection efficiency for a long time by connecting an electronic cooler to the upstream side of a catalytic tower packed with a catalyst to decompose waste ozone in series and by providing a collector with a cleaning part under the cooler.
CONSTITUTION: An electronic cooler 3 is connected to the upstream of a catalytic tower 1 packed with an ozone decomposing catalyst 2 using a pipe line 13 and a pipe line 14 is connected to the electronic cooler 3. A corrosive product containing water condensed by the cooler 3 is collected in a collector 4 and when the collected material is collected over a definite quantity, cleaning operation starts to feed a cleaning solution. Thus, catalytic ability is improved and catalytic life is prolonged.
ISHIKAWA KATSUHIRO
TAGUCHI KENJI
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