Title:
フォトレジスト現像排水の排水処理システム
Document Type and Number:
Japanese Patent JP5256002
Kind Code:
B2
Inventors:
Nakamori Osamu
Takashi Futatsugi
Yoshinobu Ono
Takahashi Ichie
Taro Oe
Takashi Futatsugi
Yoshinobu Ono
Takahashi Ichie
Taro Oe
Application Number:
JP2008299657A
Publication Date:
August 07, 2013
Filing Date:
November 25, 2008
Export Citation:
Assignee:
Organo Corporation
International Classes:
C02F1/42; B01D61/44; B01J49/00; C02F1/44; C02F1/469; C02F1/58; C02F1/74
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Attorney, Agent or Firm:
Patent Corporation yki International Patent Office
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