Title:
水噴射装置および水ノズル
Document Type and Number:
Japanese Patent JP7444632
Kind Code:
B2
Abstract:
To easily adjust a water reception point of processing water injected from a water nozzle.SOLUTION: A control part adjusts the amount of water that flows in first to third inclined pipes 201-203 by controlling first to third flow rate adjustment parts 221-223. Accordingly, the control part can change the injection direction of cutting water to be injected from an injection port 205 of a cutting water nozzle 66, and receive the water at a predetermined water reception point. This way, the water reception point of the cutting water injected from the injection port 205 of the cutting water nozzle 66 may be easily adjusted without changing the position and the direction of the cutting water nozzle 66 by controlling the amount of water that flows in the first to third inclined pipes 201-203.SELECTED DRAWING: Figure 3
Inventors:
Dai Saito
Application Number:
JP2020027172A
Publication Date:
March 06, 2024
Filing Date:
February 20, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23Q11/10; B05B1/30; B05B1/34; B24B55/02; H01L21/304
Domestic Patent References:
| JP6047671A | ||||
| JP6047666A | ||||
| JP2017217754A | ||||
| JP2007160155A |
Attorney, Agent or Firm:
Patent Attorney Corporation Tokyo Alpa Patent Office