Title:
ウォータージェット加工装置
Document Type and Number:
Japanese Patent JP5261086
Kind Code:
B2
Inventors:
Satoshi Tateiwa
Satoshi Hanashima
Matsubara Masayuki
Shigekazu Kanai
Satoshi Hanashima
Matsubara Masayuki
Shigekazu Kanai
Application Number:
JP2008228853A
Publication Date:
August 14, 2013
Filing Date:
September 05, 2008
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24C3/00; B24C7/00; B24C9/00; B26F3/00; H01L21/301
Domestic Patent References:
| JP2007083363A | ||||
| JP11114831A | ||||
| JP2002233957A | ||||
| JP2004276182A | ||||
| JP2008093802A | ||||
| JP2006521938A |
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki
Sachiko Okunuki