Title:
WATER-SOLUBLE GRINDING/POLISHING LIQUID FOR METAL AND/OR HARD BRITTLE MATERIAL
Document Type and Number:
Japanese Patent JP2002338987
Kind Code:
A
Abstract:
To prepare a water-soluble grinding/polishing liquid for a metal and/or a hard brittle material improved in working speed.
This water-soluble grinding/polishing liquid contains an 8-36C aliphatic carboxamide and a polyoxyalkylene glycol of the formula (1): Z-[{(CH2CH2O)a-(AO)b}R]p (wherein R is a 1-18C alkyl or alkenyl, a 2-24C acyl or H; Z is a 1-6C p-valent alcohol residue; A is a 3-4C alkylene; (a) and (b) are each an integer of 0 or higher provided the mean number of them is 10-100 and (a/b) is (30/70)-(70/30); and (p) is an integer of 1-6).
Inventors:
YAMAKAWA SATORU
YAMADA YASUHIRO
IMAI TAKAKAZU
YAMADA YASUHIRO
IMAI TAKAKAZU
Application Number:
JP2001144492A
Publication Date:
November 27, 2002
Filing Date:
May 15, 2001
Export Citation:
Assignee:
SANYO CHEMICAL IND LTD
International Classes:
B24B37/00; C10M105/68; C10M107/34; C10M133/16; C10M133/56; C10M145/36; C10M173/02; H01L21/304; C10N40/22; (IPC1-7): C10M173/02; B24B37/00; C10M105/68; C10M107/34; C10M133/16; C10M133/56; C10M145/36; H01L21/304