Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
WATER TANK AND COOLING TOWER EQUIPPED WITH THE SAME AS WELL AS MANUFACTURING METHOD OF SEMI-CONDUCTOR DEVICE
Document Type and Number:
Japanese Patent JP2002054892
Kind Code:
A
Abstract:

To provide a water tank and a cooling tower equipped with the same as well as the manufacturing method of a semi-conductor device, eliminated in the fear of trouble and capable of preventing the suction of air with a simple structure without increasing a weight or a cost.

The water tank 21 is provided with a bottom surface 6 having a water suction port 5 for discharging water and an air suction preventing member 8 for covering the water suction port 5 at the upper part of the same which is apart from the bottom surface 6 through a gap 7 for the inflow of water into the water suction port 5. The air suction preventing member 8 is arranged so as to preclude the suction of air through the water suction port 5, which is caused by the generation of vortexes in the water suction port 5.


Inventors:
Watabe, Mitsuaki
Application Number:
JP2001000033614
Publication Date:
February 20, 2002
Filing Date:
February 09, 2001
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
F25D17/02; F28F25/02; F28F25/04; H01L21/00; (IPC1-7): F28F25/04; F25D17/02
Attorney, Agent or Firm:
深見 久郎 (外4名)