波面光学測定装置

Title:

波面光学測定装置

Document Type and Number:

Japanese Patent JP5595463

Kind Code:

B2

Inventors:

Okubo 彰律
Yasuyuki Unno

Application Number:

JP2012227395A

Publication Date:

September 24, 2014

Filing Date:

October 12, 2012

Export Citation:

Assignee:

Canon, Inc.

International Classes:

G01M11/02; G01J9/00; G01M11/00

Attorney, Agent or Firm:

Yasunari Otsuka
Shiro Takayanagi
Yasuhiro Otsuka
Hideji Kimura
Shimoyama 治
Yukimitsu Nagagawa

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