Title:
波面歪み量測定装置、波面補償装置、光学測定装置、および方法
Document Type and Number:
Japanese Patent JP6379031
Kind Code:
B2
Inventors:
Keisuke Isobe
Katsumi Midorikawa
Katsumi Midorikawa
Application Number:
JP2014266374A
Publication Date:
August 22, 2018
Filing Date:
December 26, 2014
Export Citation:
Assignee:
RIKEN
International Classes:
G01M11/02; G01J9/02; G01N21/64; G02F1/39
Domestic Patent References:
| JP201187830A | ||||
| JP2011232243A | ||||
| JP11230833A |
Foreign References:
| US7423766 |
Other References:
谷田貝 豊彦,「光干渉計測法の最近の進歩」,精密機械,社団法人精機学会,1985年 4月 5日,Vol.51, No.4,pp.695-702,ISSN 0374-3543
Attorney, Agent or Firm:
Yoshiyuki Kawaguchi
Mayuko Wakuda
Mayuko Wakuda