Title:
WAVEFRONT MEASUREMENT DEVICE, WAVEFRONT MEASURING METHOD, AND MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2020012782
Kind Code:
A
Abstract:
To provide a wavefront measurement device capable of measuring a transmission wavefront at a plurality of view angles of an optical system with a small-sized and simple configuration.SOLUTION: A wavefront measurement device (1) includes: a division part (40) in which light from a light source (10) is divided to generate a plurality of lights (200a, 201a, 202a) corresponding to a plurality of view angles of an optical system to be inspected (50); light-receiving parts (90, 91, 92) which receive the plurality of lights (200b, 201b, 202b) separated through the optical system to be inspected; and acquisition means (100) for acquiring the wavefront at the plurality of transmission lights of the optical system to be inspected on the basis of a plurality of light signals received by the light-receiving parts.SELECTED DRAWING: Figure 1
Inventors:
SUGIMOTO TOMOHIRO
Application Number:
JP2018136640A
Publication Date:
January 23, 2020
Filing Date:
July 20, 2018
Export Citation:
Assignee:
CANON KK
International Classes:
G01M11/02; G01J9/00
Attorney, Agent or Firm:
Ryosuke Fujimoto
Atsushi Mizumoto
Hirayama Tomoya
Atsushi Mizumoto
Hirayama Tomoya