Title:
WAVEFRONT SENSOR
Document Type and Number:
Japanese Patent JP2017181038
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a laser beam wavefront sensor having a simple structure and a wide measurement angle range.SOLUTION: A wavefront sensor includes an angle-selective filter configured to exhibit different reflectance depending on an angle of incidence, and a photodetector configured to receive light coming in through the angle-selective filter.SELECTED DRAWING: Figure 1
Inventors:
ISHIKAWA TAKASHI
ITO TOSHIHARU
TAKAHASHI SEIGO
ITO TOSHIHARU
TAKAHASHI SEIGO
Application Number:
JP2016063168A
Publication Date:
October 05, 2017
Filing Date:
March 28, 2016
Export Citation:
Assignee:
NEC CORP
International Classes:
G01J9/00; G02B5/08; G02B26/06; G02B26/08
Attorney, Agent or Firm:
Kato Asamichi
Kiuchi Uchida
Mitsuru Aoki
Higuchi
Mikio Takahashi
Kiuchi Uchida
Mitsuru Aoki
Higuchi
Mikio Takahashi