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Title:
WAVEGUIDE TYPE THERMOOPTIC PHASE SHIFTER AND ITS OPTICAL CIRCUIT
Document Type and Number:
Japanese Patent JP2007065645
Kind Code:
A
Abstract:

To provide a waveguide type thermooptic phase shifter which has higher reliability and an optical circuit using the same.

In the waveguide type thermooptic phase shifter, having a buried type optical waveguide comprising a clad layer 2 and a core layer 3 formed on a substrate 1, thin-film heaters 15 and 16 formed on its top surface, and a groove 17 formed by removing the clad layer 2 along a side face of the optical waveguide, and its optical circuit, an opening shape of the groove 17 in a substrate horizontal direction is formed of a plurality of straight lines and curved lines connecting them and the corner part between the bottom surface and the side face of the groove 17 in a sectional shape of the groove 17 in a substrate vertical direction is formed of a smooth curve.


Inventors:
SOMA SHUNICHI
WATANABE TOSHIO
SHIBATA TOMOHIRO
TAKAHASHI HIROSHI
OKUNO MASAYUKI
Application Number:
JP2006212811A
Publication Date:
March 15, 2007
Filing Date:
August 04, 2006
Export Citation:
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Assignee:
NIPPON TELEGRAPH & TELEPHONE
NTT ELECTRONICS CORP
International Classes:
G02F1/01
Domestic Patent References:
JP2004004342A2004-01-08
JP2001222034A2001-08-17
JP2002062449A2002-02-28
JP2004309927A2004-11-04
JP2002221630A2002-08-09
JP2001154044A2001-06-08
JP2003084250A2003-03-19
Attorney, Agent or Firm:
Toshiro Mitsuishi
Yasuyuki Tanaka
Hiroshi Matsumoto



 
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