Title:
WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL MODULE, AND ELECTRONIC EQUIPMENT
Document Type and Number:
Japanese Patent JP2015106107
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter that can spectrally divide light in a wide area while maintaining high resolution, and to provide an optical module and electronic equipment.SOLUTION: A wavelength variable interference filter 5 includes a plurality of filter units 50 each having a pair of reflection films 54, 55 opposing to each other and a gap varying unit for varying a gap between the pair of reflection films 54, 55. The plurality of filter units 50 is two-dimensionally arranged on a layout plane parallel to the reflection surfaces of the reflection films 54, 55. When the filter is observed in a predetermined direction (first direction V) along the layout plane, two pairs of reflection films 54, 55 adjoin to each other at a predetermined interval on a first virtual line L1 intersecting the predetermined direction (first direction V), and reflection films 54, 55 of another filter unit 50C arranged at a position different from positions on the first virtual line L1 are tightly arranged as partially overlapping the reflection films 54, 55 on the first virtual line L1.
Inventors:
SANO AKIRA
MAKIGAKI TOMOHIRO
SAKURAI KAZUNORI
MAKIGAKI TOMOHIRO
SAKURAI KAZUNORI
Application Number:
JP2013248931A
Publication Date:
June 08, 2015
Filing Date:
December 02, 2013
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
G02B26/00; B81B3/00; G01J3/26
Attorney, Agent or Firm:
Masahiko Ueyanagi
Kazuaki Watanabe
Kazuaki Watanabe