Title:
Board mounting and removal device
Document Type and Number:
Japanese Patent JP6323592
Kind Code:
B2
Inventors:
Tatsuo Fukui
Application Number:
JP2017082087A
Publication Date:
May 16, 2018
Filing Date:
April 18, 2017
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/677; B65G49/06; B65H5/10; B65H5/12; B65H5/14; B65H7/14; G03F7/20; H01L21/683
Domestic Patent References:
| JP2009093027A | ||||
| JP2010129706A | ||||
| JP2004185870A | ||||
| JP2004335513A | ||||
| JP2008171998A | ||||
| JP2012032837A | ||||
| JP2011529583A |
Foreign References:
| US20090107633 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Tadashi Takahashi