To provide a weight sensor that prevents a crack in an insulated layer in baking from being caused by difference in thermal expansion coefficient between an electrode and an insulated layer, and has an improved yield in manufacturing.
The weight sensor comprises a strain body 12 that has a plurality of through holes 10 and is made of a metal plate (stainless plate) where strain is generated by a load, four resistance elements 14 that are arranged between the through holes 10 of the strain body 12 and whose resistance values vary according to the strain amount, electrodes 16 connected to both ends of the resistance elements 14, and a signal processing circuit 18 connected to the electrode 16 via wiring patterns 17. The resistance elements 14, electrodes 16 and the wiring patterns 17 are simultaneously baked together with an insulated layer 20 made of insulated glass arranged on the strain body 12 on the insulated layer 20. The electrodes 16 and wiring patterns before baking contain Ag particles whose particle sizes are 2.0-10.0 μm, and inorganic filler of 1.0-3.0 wt.% is added to the insulated layer before baking.
COPYRIGHT: (C)2007,JPO&INPIT
ISHIDA HIROAKI
MIZUKAMI YUKIO
OBAYASHI MASAHIKO
| JPH0878847A | 1996-03-22 | |||
| JPS63271878A | 1988-11-09 | |||
| JP2006194598A | 2006-07-27 | |||
| JP2002525599A | 2002-08-13 |
| WO2005043102A1 | 2005-05-12 | |||
| WO2004015384A1 | 2004-02-19 |
Hiroki Naito
Daisuke Nagano