Title:
ウェット洗浄装置及びウェット洗浄方法
Document Type and Number:
Japanese Patent JP6716992
Kind Code:
B2
Abstract:
A wet cleaning apparatus that cleans an item with carbon dioxide gas-dissolved water produced by dissolving carbon dioxide gas in ultrapure water, the wet cleaning apparatus including: a carbon dioxide gas-dissolving unit that dissolves carbon dioxide gas in ultrapure water; a cleaning unit that cleans an item, the cleaning unit receiving carbon dioxide gas-dissolved water fed from the carbon dioxide gas-dissolving unit; and a filtration membrane module disposed on a pipe through which the carbon dioxide gas-dissolved water is fed to the cleaning unit, the filtration membrane module being filled with a porous membrane including a cationic functional group.
Inventors:
Hideaki Iino
Nakata Koji
Kanada Masayuki
Daisuke Sato
Nakata Koji
Kanada Masayuki
Daisuke Sato
Application Number:
JP2016062178A
Publication Date:
July 01, 2020
Filing Date:
March 25, 2016
Export Citation:
Assignee:
Kurita Water Industries Ltd.
ASAHI KASEI KABUSHIKI KAISHA
ASAHI KASEI KABUSHIKI KAISHA
International Classes:
H01L21/304; B01D61/14; B01D71/26; B01D71/56; B01D71/68; B01D71/72; B01F1/00; B01J41/07; B01J41/13; B01J41/14; B01J47/12; C02F1/44
Domestic Patent References:
| JP2014173013A | ||||
| JP9141262A |
Foreign References:
| WO2014178289A1 |
Attorney, Agent or Firm:
Tsuyoshi Shigeno
Takayuki Shigeno
Takayuki Shigeno