Title:
ウェットエッチング用治具
Document Type and Number:
Japanese Patent JP5409902
Kind Code:
B2
Abstract:
A wet-etching jig, which is a wet-etching jig that holds a plate workpiece when the workpiece is wet-etched, includes: a holding unit configured to include a suction unit in which a suction port is formed for absorbing the air and a first close contact unit that is provided to surround the suction unit and that can closely contact a first surface of the workpiece to surround a predetermined region of the first surface; an exhaust path that communicates with the suction port; and a check valve that is provided in the exhaust path to intercept a flow of the air in a direction toward the suction unit and to permit a flow of the air from the suction unit.
Inventors:
Yoichiro Nishimoto
Application Number:
JP2012512561A
Publication Date:
February 05, 2014
Filing Date:
April 26, 2010
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L21/306; C23F1/08; H01L21/683
Domestic Patent References:
| JP2001053566A | 2001-02-23 | |||
| JP2009224472A | 2009-10-01 | |||
| JP2009295698A | 2009-12-17 | |||
| JP2009206485A | 2009-09-10 | |||
| JPH10275798A | 1998-10-13 | |||
| JP2001053566A | 2001-02-23 |
Attorney, Agent or Firm:
Hiroaki Sakai