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Patent Searching and Data


Title:
WIDE-RANGE PRESSURE GAGE
Document Type and Number:
Japanese Patent JPH10293077
Kind Code:
A
Abstract:

To provide a measuring instrument in which a pressure in a wide range from normal pressure up to 10-2 Pa can be measured by one pressure gage.

A very small vibrator 1 which is manufactured by a silicon process is vibrated near a resonance frequency by an exciter 4, and a change in the vibrating state of the vibrator 1 due to a change in a pressure around the vibrator 1 is detected by a detector 5 which has a piezoelectric or electrostrictive characteristic. The vibrating state of the vibrator 1 is measured as a change in the phase of a vibration frequency, a change in its amplitude or a change in a mechanical quality factor. As a result, inversely, a pressure value (a vacuum) around the vibrator 1 can be known on the basis of its detection value. In addition, as a means to detect a change in the vibrating state of the vibrator 1, an optical lever and a light-wave interferometer are used.


Inventors:
WATANABE SHUNJI
Application Number:
JP10223997A
Publication Date:
November 04, 1998
Filing Date:
April 18, 1997
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01L1/10; G01L21/22; (IPC1-7): G01L21/22; G01L1/10