Title:
広帯域分光回転補償器楕円偏光計
Document Type and Number:
Japanese Patent JP4140737
Kind Code:
B2
Abstract:
An ellipsometer for analyzing a sample (2) using a broad range of wavelengths includes a light source (4) for generating a beam of polychromatic light for interacting with the sample (2). A polarizer (6) polarizes the light beam before the light beam (14) interacts with the sample (2). A rotating compensator (8) induces phase retardations of a polarization state of the light beam. The range of wavelengths and the compensator (8) are such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 90 DEG to 180 DEG . An analyzer (10) interacts with the light beam after the light beam interacts with the sample (2). A detector (12) measures the intensity of light after interacting with the analyzer (10) as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor (23) determines the polarization state of the light, after interacting with the analyzer (10), from the light intensities measured by the detector (12).
Inventors:
Aspins, David Yee
Opsal, John
Opsal, John
Application Number:
JP50724798A
Publication Date:
August 27, 2008
Filing Date:
July 22, 1997
Export Citation:
Assignee:
Therma Wave Inc.
International Classes:
G01N21/21; G01B11/06; G01J3/02; G01J3/447; G01J4/00; G01J4/04; G02F1/01
Domestic Patent References:
| JP6042901B2 | ||||
| JP5410473B2 | ||||
| JP6103252B2 | ||||
| JP6504843A | ||||
| JP765935B2 | ||||
| JP6134442A |
Foreign References:
| WO1995002814A1 | ||||
| WO1996012941A1 |
Other References:
D Clarke, and R N Ibbett, ”A three-channel astronomical photoelectric spectropolarimeter”, Journal of Scientific Instruments, 1968年 4月, 第2シリーズ、第1巻, p.409-412
D. E. Aspnes and P. S. Hauge, ”Rotating-compensator/analyzer fixed-analyzer ellipsometer: Analysis and comparison to other automatic ellipsometers”, J. Opt. Soc. Am. , 米国, The Optical Society of America, 1976年 9月, 第66巻、第9号, p.949-953
D. E. Aspnes and P. S. Hauge, ”Rotating-compensator/analyzer fixed-analyzer ellipsometer: Analysis and comparison to other automatic ellipsometers”, J. Opt. Soc. Am. , 米国, The Optical Society of America, 1976年 9月, 第66巻、第9号, p.949-953
Attorney, Agent or Firm:
Yuzo Yamazaki
Kiko Okada
Kiko Okada
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